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Home Product Motorized 2D Translation Stage FMSXXY170Z-200-200 Linear Motor Gantry Double Drive Stage
FMSXXY170Z-200-200 Linear Motor Gantry Double Drive Stage

$20400 Delivery date：3-4 weeks

Model:

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Product Details

FMSXXY170Z-200-200 Linear Motor Gantry Double Drive Stage

 

Feinixs developed the marble gantry double-drive displacement stage of sub-micron bi-directional repeatability positioning accuracy. Stroke, accuracy and load capacity can be customized. Use double-drive structure, batter synchronism and heavier load. The Z-axis can be mounted on the Y-axis. Combined with CCD and other devices, a complete set of equipment can be delivered to customers.

 

 The range of travel： The range can be customized；

Integrated marble countertop: Ensure base accuracy

X axis adopts gantry double-drive, good synchronization;

The Y-axis mounting port is reserved for the Z-axis

Ultra-silent rotary stage：Suitable for laboratory environments and industrial sites with high performance requirements；

Free standard edition SDK：Multiple development languages are supported in the Window or Linux environment；Such as C/C++、C#、Matlab、LabVIEW etc；

The controller：Realize arc interpolation, linear interpolation, position memory to lead into arbitrary-graphics；

Option:Bus control of EtherCAT

 

APPLICATION  FIELDS

 

Dispenser、 Microscan、 Machine Vision、 Defect Detection、 Wafer Inspection、 Bio 3D Printing

 

TYPICAL ASSEMBLY

 

It can be flexibly combined into multi-axis motion system,Contact for more information

 

ERROR CURVE

 

Product parameters

Model

FMSXXY170Z-200-200

Travel(mm)

200(XY)

Load Capacity(Kg)[1]

30

Resolution(μm)

0.05

Min.Incremental Motion(μm)[2]

0.2

Undirection Repeatability[3]/Guaranteed(μm)[4]

±0.5 or 1

Undirection Repeatability/Typical(μm)

±0.3 or 0.6

Bi-Directional Repeatability/Guaranteed(μm)

±1 or 2

Bi-Directional Repeatability/Typical(μm)

±0.5 or 1

Accuracy[3]/Guaranteed(μm)

±2 or 4

Accuracy/Typical(μm)

±1 or 2

Max.Speed(mm/s)[5]

500

Straightness(μm)

10

Flatness(μm)

10

Yaw(arcsec)

10

Pitch(arcsec)

10

Weight(kg)

52

 

Remark：

[1]：The vertical-load of the center under the Horizontal-placement。

[2]：The  minimum motion increment is not the same as resolution,It means the minimum amount that a motion system can move in a continuous, stable situation. Generally, The resolution of the system is much smaller than the minimum motion increment. In consideration of the influence of transmission structure and the system error of the encoder, To compared with the linear motor displacement stages and the stepping motor displacement stages, The minimum motion increment of the linear motor displacement stages is more closer to the resolution.

[3]：The accuracy measurement data is the data measured by the laser interferometer when the platform is placed horizontally. The measurement standard reference to GB/T17421-2000

[4]：The difference between typical values and guaranteed values is described in the Technical Guide.

[5]：The maximum speed is typical values , on the basis of the difference of the load and the controller it would be Make a difference

Product size

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