高精度直线电机位移台-Feinixs



Product Details

FMS115Z High-precision Linear Motor Stages

In the field of optics and precision device, the customers in scientific research or in manufacturing industry allways strive for speed and precision, Stability and cost performance. Based on years of experience in designing and manufacturing motion control systems, Feinixs has developed a new patented product- FMS115Z Linear Motor Stages. With excellent performance and competitive price, it is used to replace the traditional Stages with servo motor + screw structure.

FMS115Z is equipped with 100nm precision grating ruler to ensure the sub micrometer grade Bi-Directional Repeatability of the Stages.

The range of travel：50mm、100mm、150mm and 200mm；

Solid frame design：Ensures XY-shaft assembly reliably with a maximum stroke of 200mm×200mm;

The encoder with precision grating ruler：Feedback be able to realize the submicron grade precision repeated positioning；

the ultra-silent stages：Suitable for laboratory environments and industrial sites with high performance requirements；

Free standard edition SDK：Multiple development languages are supported in the Window or Linux environment；Such as C/C++、C#、Matlab、LabVIEW etc；

The controller：Realize arc interpolation, linear interpolation, position memory to lead into arbitrary-graphics；

Option:Bus control of EtherCAT

APPLICATION FIELDS

Life Science 、Precision Measurement 、Semiconduct 、Aviation 、Laser 、Automatic Control

TYPICAL ASSEMBLY

It can be ﬂexibly combined into multi-axis motion system,Contact for more information

ERROR CURVE



Product parameters

Model	FMS115Z-50	FMS115Z-100	FMS115Z-150	FMS115Z-200
Travel(mm)	50	100	150	200
Load Capacity(Kg)[1]	20	10	20	10
Resolution(μm)	0.1	0.1	0.1	0.1
Min.Incremental Motion(μm)[2]	0.3	0.3	0.3	0.3
Undirection Repeatability[3]/Guaranteed(μm)[4]	±0.5 or 1	±0.5 or 1	±0.5 or 1	±0.5 or 1
Undirection Repeatability/Typical(μm)	±0.2 or 0.4	±0.2 or 0.4	±0.2 or 0.4	±0.2 or 0.4
Bi-Directional Repeatability/Guaranteed(μm)	±1 or 2	±1 or 2	±1 or 2	±1 or 2
Bi-Directional Repeatability/Typical(μm)	±0.5 or 1	±0.5 or 1	±0.5 or 1	±0.5 or 1
Accuracy[3]/Guaranteed(μm)	±2 or 4	±2 or 4	±2 or 4	±2 or 4
Accuracy/Typical(μm)	±0.5 or 1	±0.5 or 1	±0.5 or 1	±0.5 or 1
Max.Speed(mm/s)[5]	200	200	200	200
Straightness(μm)	5	5	5	5
Flatness(μm)	5	5	5	5
Yaw(arcsec)	10	15	15	20
Pitch(arcsec)	10	15	15	20
Continuous Force(N)	35.2	17.6	35.2	17.6
Peak Force(N)	176	88	176	88
Weight(kg)	3	2.9	4.4	4

Remark：

[1]：The vertical-load of the center under the Horizontal-placement。

[2]：The minimum motion increment is not the same as resolution,It means the minimum amount that a motion system can move in a continuous, stable situation. Generally, The resolution of the system is much smaller than the minimum motion increment. In consideration of the influence of transmission structure and the system error of the encoder, To compared with the linear motor Motorized drive Stages and the stepping motor Motorized drive Stages, The minimum motion increment of the linear motor Motorized drive Stages is more closer to the resolution.

[3]：The accuracy measurement data is the data measured by the laser interferometer when the platform is placed horizontally. The measurement standard reference to GB/T17421-2000

[4]：The difference between typical values and guaranteed values is described in the Technical Guide.

[5]：The maximum speed is typical values , on the basis of the difference of the load and the controller it would be Make a difference.



Product size



Related videos

【Product Showcase】FMS115Z Series Linear Motor Stage Play



Data Download



Related products

FMC04 Series Linear Motor & Servo Motor Controller
 MORE