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Home Product Motorized Translation Stage FMSS Square Table Overall Motorized drive stages
FMSS Square Table Overall Motorized drive stages

$3830 Stock：4

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Product Details

FMSS Square Table Overall Motorized drive stages

 

Motor Stages with high precision and small body size are very difficult to design. After three years of research and development and repeated testing, Feinixs finally developed the FMSS series products and successfully applied to commercial atomic force microscopes. FMSS series products equipped with imported linear motor, integrated cross roller guide rail and grating ruler, and it's speed fluctuation error within 1/1000. Under the premise of ensuring accuracy and bearing capacity, the body size is compressed to the limit.

 

The range of travel：38mm、48mm；

Square countertop: Expediency 2D superposition;

Integrated cross roller guide: reduce assembly errors;

the ultra-silent stages：Suitable for laboratory environments and industrial sites with high performance requirements；

Free standard edition SDK：Multiple development languages are supported in the Window or Linux environment；Such as C/C++、C#、Matlab、LabVIEW etc；

The controller：Realize arc interpolation, linear interpolation, position memory to lead into arbitrary-graphics；

Option:Bus control of EtherCAT

The controller：Realize arc interpolation, linear interpolation, position memory to lead into arbitrary-graphics；

Option:Bus control of EtherCAT

 

APPLICATION  FIELDS

 

Laser Target 、Wafer Cutting 、Wafer Grinding 、Laser Industry 、Medical Beauty 、High-end Equipment 、Atomic Force Microscope

 

TYPICAL ASSEMBLY

 

It can be flexibly combined into multi-axis motion system,Contact for more information

 

ERROR CURVE

 

Product parameters

Model

FMSS90C-38

FMSS125C-48

Travel(mm)

38

48

Load Capacity(Kg)[1]

4

10

Resolution(μm)

0.1

0.1

Min.Incremental Motion(μm)[2]

0.3

0.3

Undirection Repeatability[3]/Guaranteed(μm)[4]

±0.3 or 0.6

±0.5 or 1

Undirection Repeatability/Typical(μm)

±0.2 or 0.4

±0.3 or 0.6

Bi-Directional Repeatability/Guaranteed(μm)

±0.6 or 1.2

±1 or 2

Bi-Directional Repeatability/Typical(μm)

±0.3 or 0.6

±0.5 or 1

Accuracy[3]/Guaranteed(μm)

±2 or 4

±2 or 4

Accuracy/Typical(μm)

±0.5 or 1

±0.5 or 1

Max.Speed(mm/s)[5]

100

100

Straightness(μm)

5

5

Flatness(μm)

5

5

Yaw(arcsec)

10

10

Pitch(arcsec)

10

10

Continuous Force(N)

6

17.6

Peak Force(N)

24

88

Weight(kg)

1.1

2.1

 

Remark：

[1]：The vertical-load of the center under the Horizontal-placement。

[2]：The  minimum motion increment is not the same as resolution,It means the minimum amount that a motion system can move in a continuous, stable situation. Generally, The resolution of the system is much smaller than the minimum motion increment. In consideration of the influence of transmission structure and the system error of the encoder, To compared with the linear motor Motorized drive Stages and the stepping motor Motorized drive Stages, The minimum motion increment of the linear motor Motorized drive Stages is more closer to the resolution.

[3]：The accuracy measurement data is the data measured by the laser interferometer when the platform is placed horizontally. The measurement standard reference to GB/T17421-2000

[4]：The difference between typical values and guaranteed values is described in the Technical Guide.

[5]：The maximum speed is typical values , on the basis of the difference of the load and the controller it would be Make a difference.

Product size

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