超⾼性能平移台-Feinixs

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Product Details

FMS165Z-H Ultra High Performance Stages

It is very difficult for electric motion stages to have the performance of high precision, high speed, Ultra-low speed operation capability and high stability at the same time.In 2022, Feinixs developed its flagship product series, THE FMS165Z-H ultra-high performance Stages, specifically designed for complex scientific research applications. The FMS165Z-H solves the stability problem of ultra-low speed operation,It equipped with ultra-high resolution grating ruler and ultra-high precision assembly process to make the series Stages have excellent ultra-low speed operation ability and achieve sub-μm level of repeated positioning accuracy.FMS165Z-H equipped with built-in tow chain for wire Harness arrangement conveniently. Combined with the FMC04-H series controller of Feinixs high performance version, it can perfectly present all advanced functions of the high performance version controller. The operating speed is up to 1m/s, close to the theoretical limit of the maximum speed of short travel motor stages.

The range of travel：150mm、200mm、250mm and 300mm；

Minimum step distance up to 50 nm： can move stably at super slow speed;

The encoder with 5 nm resolution grating ruler：Feedback be able to realize the submicron grade precision repeated positioning；

the ultra-silent stages：Suitable for laboratory environments and industrial sites with high performance requirements；

Free standard edition SDK：Multiple development languages are supported in the Window or Linux environment；Such as C/C++、C#、Matlab、LabVIEW etc；

The controller：Realize arc interpolation, linear interpolation, position memory to lead into arbitrary-graphics；

Option:Bus control of EtherCAT

APPLICATION FIELDS

Industrial CT 、Femtosecond processing 、Semiconduct、Microscan、Fiber Delay Line、Laser Cutter、Laser Welder、Medical、Equipment Manufacturing

TYPICAL ASSEMBLY

It can be ﬂexibly combined into multi-axis motion system,Contact for more information

ERROR CURVE

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Product parameters

Model	FMS165Z-150H	FMS165Z-200H	FMS165Z-250H	FMS165Z-300H
Travel(mm)	150	200	250	300
Load Capacity(Kg)[1]	40	20	40	20
Resolution(μm)	0.02	0.02	0.02	0.02
Min.Incremental Motion(μm)[2]	0.1	0.1	0.1	0.1
Undirection Repeatability[3]/Guaranteed(μm)[4]	±0.2 or 0.4	±0.2 or 0.4	±0.2 or 0.4	±0.2 or 0.4
Undirection Repeatability/Typical(μm)	±0.1 or 0.2	±0.1 or 0.2	±0.1 or 0.2	±0.1 or 0.2
Bi-Directional Repeatability/Guaranteed(μm)	±0.3 or 0.6	±0.3 or 0.6	±0.3 or 0.6	±0.3 or 0.6
Bi-Directional Repeatability/Typical(μm)	±0.2 or 0.4	±0.2 or 0.4	±0.2 or 0.4	±0.2 or 0.4
Accuracy[3]/Guaranteed(μm)	±1 or 2	±1 or 2	±1 or 2	±1 or 2
Accuracy/Typical(μm)	±0.5 or 1	±0.5 or 1	±0.5 or 1	±0.5 or 1
Max.Speed(mm/s)[5]	500	500	500	500
Straightness(μm)	5	5	5	5
Flatness(μm)	5	5	5	5
Yaw(arcsec)	15	15	15	15
Pitch(arcsec)	15	15	15	15
Continuous Force(N)	58	29	58	29
Peak Force(N)	200	100	200	100
Weight(kg)	13.5	13	18	17.5

Remark：

[1]：The vertical-load of the center under the Horizontal-placement。

[2]：The minimum motion increment is not the same as resolution,It means the minimum amount that a motion system can move in a continuous, stable situation. Generally, The resolution of the system is much smaller than the minimum motion increment. In consideration of the influence of transmission structure and the system error of the encoder, To compared with the linear motor Motorized drive Stages and the stepping motor Motorized drive Stages, The minimum motion increment of the linear motor Motorized drive Stages is more closer to the resolution.

[3]：The accuracy measurement data is the data measured by the laser interferometer when the platform is placed horizontally. The measurement standard reference to GB/T17421-2000

[4]：The difference between typical values and guaranteed values is described in the Technical Guide.

[5]：The maximum speed is typical values , on the basis of the difference of the load and the controller it would be Make a difference.

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