⼯业型全封闭⾼精度平移台-Feinixs

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Product Details

FMS-Z-HI Industrial Fully enclosed High-precision Motorized drive stages

For long-term continuous harsh working conditions, A new series of fully enclosed Linear Motor Driving Stages has been developed by the Feinixs, which meet the requirements of high speed, high precision, heavy load and reliability at the same time. The series of products cover a variety of load range and travel range, and the key performance such as bidirectional repeated positioning accuracy and absolute positioning accuracy have reached international standards.

The range of travel：Standard stroke coverage 100mm-1000mm,the stroke can be customized if needed；

Minimum step distance up to 50 nm: can move stably at super-slow speed;

The encoder with high resolution grating ruler：Feedback be able to realize the submicron grade precision repeated positioning；

the ultra-silent stages：Suitable for laboratory environments and industrial sites with high performance requirements；

Free standard edition SDK：Multiple development languages are supported in the Window or Linux environment；Such as C/C++、C#、Matlab、LabVIEW etc；

The controller：Realize arc interpolation, linear interpolation, position memory to lead into arbitrary-graphics；

Option:Bus control of EtherCAT

The controller：Realize arc interpolation, linear interpolation, position memory to lead into arbitrary-graphics；

Option:Bus control of EtherCAT

APPLICATION FIELDS

Laser Cutting 、Laser Welding 、Industrial CT 、Robotic Arm 、Semiconductor 、 Automation Equipment 、Lithium Battery Test Equipment

TYPICAL ASSEMBLY

It can be ﬂexibly combined into multi-axis motion system,Contact for more information

ERROR CURVE

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Product parameters

Model	FMS165Z-100HI	FMS165Z-200HI	FMS165Z-300HI
Travel(mm)	100	200	300
Load Capacity(Kg)[1]	20	20	20
Resolution(μm)	0.02	0.02	0.02
Min.Incremental Motion(μm)[2]	0.1	0.1	0.1
Undirection Repeatability[3]/Guaranteed(μm)[4]	±0.2 or 0.4	±0.2 or 0.4	±0.2 or 0.4
Undirection Repeatability/Typical(μm)	±0.1 or 0.2	±0.1 or 0.2	±0.1 or 0.2
Bi-Directional Repeatability/Guaranteed(μm)	±0.3 or 0.6	±0.3 or 0.6	±0.3 or 0.6
Bi-Directional Repeatability/Typical(μm)	±0.2 or 0.4	±0.2 or 0.4	±0.2 or 0.4
Accuracy[3]/Guaranteed(μm)	±1 or 2	±1 or 2	±1 or 2
Accuracy/Typical(μm)	±0.5 or 1	±0.5 or 1	±0.5 or 1
Max.Speed(mm/s)[5]	500	500	500
Straightness(μm)	5	5	5
Flatness(μm)	5	5	5
Yaw(arcsec)	15	15	15
Pitch(arcsec)	15	15	15
Continuous Force(N)	35.2	35.2	35.2
Peak Force(N)	176	176	176
Weight(kg)	10	12.5	15

Model	FMS225Z-200HI	FMS225Z-400HI	FMS225Z-600HI
Travel(mm)	200	400	600
Load Capacity(Kg)[1]	100	100	100
Resolution(μm)	0.02	0.02	0.02
Min.Incremental Motion(μm)[2]	0.1	0.1	0.1
Undirection Repeatability[3]/Guaranteed(μm)[4]	±0.2 or 0.4	±0.2 or 0.4	±0.2 or 0.4
Undirection Repeatability/Typical(μm)	±0.1 or 0.2	±0.1 or 0.2	±0.1 or 0.2
Bi-Directional Repeatability/Guaranteed(μm)	±0.3 or 0.6	±0.3 or 0.6	±0.3 or 0.6
Bi-Directional Repeatability/Typical(μm)	±0.2 or 0.4	±0.2 or 0.4	±0.2 or 0.4
Accuracy[3]/Guaranteed(μm)	±1 or 2	±1 or 2	±1 or 2
Accuracy/Typical(μm)	±0.5 or 1	±0.5 or 1	±0.5 or 1
Max.Speed(mm/s)[5]	650	650	650
Straightness(μm)	8	8	8
Flatness(μm)	8	8	8
Yaw(arcsec)	15	20	20
Pitch(arcsec)	15	20	20
Continuous Force(N)	166	166	166
Peak Force(N)	935	935	935
Weight(kg)	32	42	52

Model	FMS280Z-600HI	FMS280Z-800HI	FMS280Z-1000HI
Travel(mm)	600	800	1000
Load Capacity(Kg)[1]	200	200	200
Resolution(μm)	0.02	0.02	0.02
Min.Incremental Motion(μm)[2]	0.1	0.1	0.1
Undirection Repeatability[3]/Guaranteed(μm)[4]	±0.3 or 0.6	±0.3 or 0.6	±0.3 or 0.6
Undirection Repeatability/Typical(μm)	±0.2 or 0.4	±0.2 or 0.4	±0.2 or 0.4
Bi-Directional Repeatability/Guaranteed(μm)	±0.5 or 1	±0.5 or 1	±0.5 or 1
Bi-Directional Repeatability/Typical(μm)	±0.3 or 0.6	±0.3 or 0.6	±0.3 or 0.6
Accuracy[3]/Guaranteed(μm)	±2 or 4	±2 or 4	±2 or 4
Accuracy/Typical(μm)	±1 or 2	±1 or 2	±1 or 2
Max.Speed(mm/s)[5]	650	650	650
Straightness(μm)	10	12	15
Flatness(μm)	10	12	15
Yaw(arcsec)	20	25	25
Pitch(arcsec)	20	25	25
Continuous Force(N)	295	295	295
Peak Force(N)	2200	2200	2200
Weight(kg)	75	95	115

Remark：

[1]：The vertical-load of the center under the Horizontal-placement。

[2]：The minimum motion increment is not the same as resolution,It means the minimum amount that a motion system can move in a continuous, stable situation. Generally, The resolution of the system is much smaller than the minimum motion increment. In consideration of the influence of transmission structure and the system error of the encoder, To compared with the linear motor Motorized drive Stages and the stepping motor Motorized drive Stages, The minimum motion increment of the linear motor Motorized drive Stages is more closer to the resolution.

[3]：The accuracy measurement data is the data measured by the laser interferometer when the platform is placed horizontally. The measurement standard reference to GB/T17421-2000

[4]：The difference between typical values and guaranteed values is described in the Technical Guide.

[5]：The maximum speed is typical values , on the basis of the difference of the load and the controller it would be Make a difference.

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