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Home Product Motorized Translation Stage FMS80R Stepper Motor High-precision Integral Table Stages
FMS80R Stepper Motor High-precision Integral Table Stages

$1150 Delivery date：3-4 weeks

Model:

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Product Details

FMS80R Stepper Motor High-precision Integral Table Stages

 

Feinixs has developed the FMS80R series of stepper motor Stages, which is equipped with Japanese THK P-class cross roller guide rail and Shanghai MOONS motor. Large table top and thin machine design make it widely used in scientific research and industrial fields. Feinixs 'extreme quality control requirements and assembly process ensure that its performance is the best of its kind.

 

The range of travel：50mm、100mm、150mm；

Solid frame design：Ensures XY-shaft assembly reliably with a maximum stroke of 150mm×150mm;

Free standard edition SDK：Multiple development languages are supported in the Window or Linux environment；Such as C/C++、C#、Matlab、LabVIEW etc；

 

APPLICATION  FIELDS

 

Laser Target 、Optical Machine 、Wafer Cutting 、Wafer Grinding

 

TYPICAL ASSEMBLY

 

It can be flexibly combined into multi-axis motion system,Contact for more information

 

ERROR CURVE

 

Product parameters

Model

FMS80R-30

FMS80R-50

Travel(mm)

30

50

Load Capacity(Kg)[1]

10

10

Resolution(μm)

0.625

0.625

Min.Incremental Motion(μm)[2]

1

1

Undirection Repeatability[3]/Guaranteed(μm)[4]

±1 or 2

±1 or 2

Undirection Repeatability/Typical(μm)

±0.5 or 1

±0.5 or 1

Bi-Directional Repeatability/Guaranteed(μm)

±2 or 4

±2 or 4

Bi-Directional Repeatability/Typical(μm)

±1 or 2

±1 or 2

Accuracy[3]/Guaranteed(μm)

±10 or 20

±10 or 20

Accuracy/Typical(μm)

±5 or 10

±5 or 10

Max.Speed(mm/s)[5]

10

10

Straightness(μm)

10

10

Flatness(μm)

10

10

Yaw(arcsec)

20

30

Pitch(arcsec)

20

30

Weight(kg)

1.3

1.3

 

Remark：

[1]：The vertical-load of the center under the Horizontal-placement。

[2]：The  minimum motion increment is not the same as resolution,It means the minimum amount that a motion system can move in a continuous, stable situation. Generally, The resolution of the system is much smaller than the minimum motion increment. In consideration of the influence of transmission structure and the system error of the encoder, To compared with the linear motor Motorized drive Stages and the stepping motor Motorized drive Stages, The minimum motion increment of the linear motor Motorized drive Stages is more closer to the resolution.

[3]：The accuracy measurement data is the data measured by the laser interferometer when the platform is placed horizontally. The measurement standard reference to GB/T17421-2000

[4]：The difference between typical values and guaranteed values is described in the Technical Guide.

[5]：The maximum speed is typical values , on the basis of the difference of the load and the controller it would be Make a difference.

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