⾼精度直线电机升降台-Feinixs

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Product Details

FMSZ-C Linear Motor Motorized Vertical Stages

The linear motor motorized vertical stages developed by Feinixs has two configurations: constant force spring counterweight and cylinder counterweight. Especially suitable for applications with special requirements on size and strict requirements on Pitch and Yaw. The FMSZ-C series motorized vertical stages have the characteristics of simple structure and excellent micro-stepping capability and position stability in the application environment of high-precision testing and precision laboratory infrastructure construction.

The range of travel：50mm 100mm；

Two models are available: constant force spring OR cylinder weight;

Integration cross roller guide: reduce assembly errors;

Ultra-silent Stages：Suitable for laboratory environments and industrial sites with high performance requirements；

Free standard edition SDK：Multiple development languages are supported in the Window or Linux environment；Such as C/C++、C#、Matlab、LabVIEW etc；

The controller：Realize arc interpolation, linear interpolation, position memory to lead into arbitrary-graphics；

Option:Bus control of EtherCAT

APPLICATION FIELDS

Precision Z-axis 、High-end Equipment 、Semiconductor Inspection 、Semiconductor Cutting

TYPICAL ASSEMBLY

It can be ﬂexibly combined into multi-axis motion system,Contact for more information

ERROR CURVE

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Product parameters

Model	FMSZ125C-50	FMSZ140C-100
Travel(mm)	50	100
Load Capacity(Kg)[1]	4	4
Resolution(μm)	0.1	0.1
Min.Incremental Motion(μm)[2]	0.3	0.3
Undirection Repeatability[3]/Guaranteed(μm)[4]	±0.5 or 1	±0.5 or 1
Undirection Repeatability/Typical(μm)	±0.3 or 0.6	±0.3 or 0.6
Bi-Directional Repeatability/Guaranteed(μm)	±1 or 2	±1 or 2
Bi-Directional Repeatability/Typical(μm)	±0.5 or 1	±0.5 or 1
Accuracy[3]/Guaranteed(μm)	±2 or 4	±2 or 4
Accuracy/Typical(μm)	±1 or 2	±1 or 2
Max.Speed(mm/s)[5]	100	100
Straightness(μm)	10	10
Flatness(μm)	10	10
Yaw(arcsec)	20	20
Pitch(arcsec)	20	20
Continuous Force(N)	17.6	17.6
Peak Force(N)	88	88
Weight(kg)	6.5	10.2

Remark：

[1]：The vertical-load of the center under the Horizontal-placement。

[2]：The minimum motion increment is not the same as resolution,It means the minimum amount that a motion system can move in a continuous, stable situation. Generally, The resolution of the system is much smaller than the minimum motion increment. In consideration of the influence of transmission structure and the system error of the encoder, To compared with the linear motor Motorized drive Stages and the stepping motor Motorized drive Stages, The minimum motion increment of the linear motor Motorized drive Stages is more closer to the resolution.

[3]：The accuracy measurement data is the data measured by the laser interferometer when the platform is placed horizontally. The measurement standard reference to GB/T17421-2000

[4]：The difference between typical values and guaranteed values is described in the Technical Guide.

[5]：The maximum speed is typical values , on the basis of the difference of the load and the controller it would be Make a difference.

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Product size

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