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Home Product Motorized Vertical Stage FMSZ120S-H Ultra-high-precision Servo Motor Motorized Vertical Stages
FMSZ120S-H Ultra-high-precision Servo Motor Motorized Vertical Stages

$5690 Delivery date：3-4 weeks

Model:

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Product Details

FMSZ120S-H Ultra-high-precision Servo Motor Motorized Vertical Stages

 

In some high-precision applications, the vertical Stages needs to lock itself in case of power failure. For this application, Feinixs developed FMSZ120S-H series vertical Stages, using imported C3 grade screw + high-precision SP grade guide rail. Feinixs's extreme quality control requirements and assembly process make this series of products small size, fast speed, high precision. The grating ruler is available in an absolute encoder version (-HA).The grating ruler is available in an absolute encoder version (-HA). 

 

The range of travel：100mm、200mm；

Power-off self-locking, extremely compact volume;

The precision compensation is realized by the Feinixs's controller;

Ultra-silent Stages：Suitable for laboratory environments and industrial sites with high performance requirements；

Free standard edition SDK：Multiple development languages are supported in the Window or Linux environment；Such as C/C++、C#、Matlab、LabVIEW etc；

The controller：Realize arc interpolation, linear interpolation, position memory to lead into arbitrary-graphics；

Option:Bus control of EtherCAT

 

APPLICATION  FIELDS

 

Defect Detection 、Machine Vision 、Laser Target 、Sample Adjustment 、Dispenser 、Gantry Dual Drive Z Axis

 

TYPICAL ASSEMBLY

 

It can be flexibly combined into multi-axis motion system,Contact for more information

 

ERROR CURVE

 

Product parameters

Model

FMSZ120S-100H/HA

FMSZ120S-200H/HA

Travel(mm)

100

200

Load Capacity(Kg)[1]

10

10

Resolution(μm)

0.1

0.1

Min.Incremental Motion(μm)[2]

0.5

0.5

Undirection Repeatability[3]/Guaranteed(μm)[4]

±0.3 or 0.6

±0.3 or 0.6

Undirection Repeatability/Typical(μm)

±0.2 or 0.4

±0.2 or 0.4

Bi-Directional Repeatability/Guaranteed(μm)

±0.5 or 1

±0.5 or 1

Bi-Directional Repeatability/Typical(μm)

±0.3 or 0.6

±0.3 or 0.6

Accuracy[3]/Guaranteed(μm)

±2 or 4

±2 or 4

Accuracy/Typical(μm)

±1 or 2

±1 or 2

Max.Speed(mm/s)[5]

100

100

Straightness(μm)

10

10

Flatness(μm)

10

10

Yaw(arcsec)

15

15

Pitch(arcsec)

15

15

Weight(kg)

6.5

7.8

 

Remark：

[1]：The vertical-load of the center under the Horizontal-placement。

[2]：The  minimum motion increment is not the same as resolution,It means the minimum amount that a motion system can move in a continuous, stable situation. Generally, The resolution of the system is much smaller than the minimum motion increment. In consideration of the influence of transmission structure and the system error of the encoder, To compared with the linear motor Motorized drive Stages and the stepping motor Motorized drive Stages, The minimum motion increment of the linear motor Motorized drive Stages is more closer to the resolution.

[3]：The accuracy measurement data is the data measured by the laser interferometer when the platform is placed horizontally. The measurement standard reference to GB/T17421-2000

[4]：The difference between typical values and guaranteed values is described in the Technical Guide.

[5]：The maximum speed is typical values , on the basis of the difference of the load and the controller it would be Make a difference.

Product size

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