⾼性能直驱旋转台(绝对值编码器)-Feinixs

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Product Details

FMSR-DA High Performance Direct Drive rotation Stages

FMSR-DA series adopts Biss-C protocol absolute encoder with iron core motor. Compared with the original FMSR-D series, the FMSR-DA series is not afraid of harsh application environments such as dust and oil.And using the absolute value encoder, rather than the incremental encoder. The repeatability is within ±1.5 arc sec. The most important point is that without error compensation, the absolute accuracy can be reached within ±15 arc sec.

The range of travel：from 120mm to 400mm, The larger size can be customized；

Equipped with imported direct drive motor;

Equipped with high-precision bearing;

Ultra-silent stages：Suitable for laboratory environments and industrial sites with high performance requirements；

Free standard edition SDK：Multiple development languages are supported in the Window or Linux environment；Such as C/C++、C#、Matlab、LabVIEW etc；

The controller：Realize arc interpolation, linear interpolation, position memory to lead into arbitrary-graphics；

Option:Bus control of EtherCAT

APPLICATION FIELDS

Optical Path Switching 、Industrial CT 、Semiconductor Inspection 、Machine Vision 、Medical Beauty

TYPICAL ASSEMBLY

It can be ﬂexibly combined into multi-axis motion system,Contact for more information

ERROR CURVE

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Product parameters

Model	FMSR120DA	FMSR160DA	FMSR200DA
Travel(°)	360	360	360
Load Capacity(Kg)[1]	30	50	70
Load Capacity(Inverted/Wall Mounting)(Kg)	8	15	20
Resolution(°)	0.0005	0.0005	0.0005
Min.Incremental Motion(°)[2]	0.001	0.001	0.001
Undirection Repeatability[3]/Guaranteed(°)[4]	±0.002 or 0.004	±0.002 or 0.004	±0.002 or 0.004
Undirection Repeatability/Typical(°)	±0.001 or 0.002	±0.001 or 0.002	±0.001 or 0.002
Bi-Directional Repeatability/Guaranteed(°)	±0.003 or 0.006	±0.003 or 0.006	±0.003 or 0.006
Bi-Directional Repeatability/Typical(°)	±0.002 or 0.004	±0.002 or 0.004	±0.002 or 0.004
Accuracy[3]/Guaranteed(°)	±0.005 or 0.01	±0.005 or 0.01	±0.005 or 0.01
Accuracy/Typical(°)	±0.003 or 0.006	±0.003 or 0.006	±0.003 or 0.006
Max.Speed(°/s)[5]	4800	2880	3600
Face Runout/Guaranteed(μm)	10	10	10
Radial Runout/Guaranteed(μm)	10	10	10
Weight(kg)	4	7	11

Model	FMSR280DA	FMSR400DA
Travel(°)	360	360
Load Capacity(Kg)[1]	120	500
Load Capacity(Inverted/Wall Mounting)(Kg)	30	100
Resolution(°)	0.0005	0.0005
Min.Incremental Motion(°)[2]	0.001	0.001
Undirection Repeatability[3]/Guaranteed(°)[4]	±0.002 or 0.004	±0.002 or 0.004
Undirection Repeatability/Typical(°)	±0.001 or 0.002	±0.001 or 0.002
Bi-Directional Repeatability/Guaranteed(°)	±0.003 or 0.006	±0.003 or 0.006
Bi-Directional Repeatability/Typical(°)	±0.002 or 0.004	±0.002 or 0.004
Accuracy[3]/Guaranteed(°)	±0.005 or 0.01	±0.005 or 0.01
Accuracy/Typical(°)	±0.003 or 0.006	±0.003 or 0.006
Max.Speed(°/s)[5]	690	450
Face Runout/Guaranteed(μm)	15	20
Radial Runout/Guaranteed(μm)	15	20
Weight(kg)	36	110

Remark：

[1]：The vertical-load of the center under the Horizontal-placement。

[2]：The minimum motion increment is not the same as resolution,It means the minimum amount that a motion system can move in a continuous, stable situation. Generally, The resolution of the system is much smaller than the minimum motion increment. In consideration of the influence of transmission structure and the system error of the encoder, To compared with the linear motor Motorized drive Stages and the stepping motor Motorized drive Stages, The minimum motion increment of the linear motor Motorized drive Stages is more closer to the resolution.

[3]：The accuracy measurement data is the data measured by the laser interferometer when the platform is placed horizontally. The measurement standard reference to GB/T17421-2000

[4]：The difference between typical values and guaranteed values is described in the Technical Guide.

[5]：The maximum speed is typical values , on the basis of the difference of the load and the controller it would be Make a difference.

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Product size

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