气浮轴承旋转台-Feinixs

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Product Details

FMSR-AB High precision air floating rotation Stages

The FMSR-AB series high precision air floating rotation Stages developed by feinixs uses specially designed air bearings that are optimized for stiffness, load bearing capacity and stiffness. Compared to conventional bearings, gas is used as a lubricant, so all movement is contactless, so the performance of the equipment remains the same throughout its service life, and no special maintenance is required. The rotation Stages uses gas bearings to provide smooth motion and has extremely low pitch, yaw, roll and linear errors. In addition, it has the advantages of clean, pollution-free, friction-free, small damping and long service life.

Closed air bearing structure: No maintenance,long service life

Direct drive, No gear slot;

Micrometer grade Run-out error;

Free standard edition SDK：Multiple development languages are supported in the Window or Linux environment；Such as C/C++、C#、Matlab、LabVIEW etc；

The controller：Realize arc interpolation, linear interpolation, position memory to lead into arbitrary-graphics；

Option:Bus control of EtherCAT

APPLICATION FIELDS

Roundness measurement system、 Micron or nano tomography imaging、 Precision manufacturing、 Synchrotron radiation or X-rays、 Semiconductor industry

TYPICAL ASSEMBLY

It can be ﬂexibly combined into multi-axis motion system,Contact for more information

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Product parameters

Model	FMSR150-AB	FMSR200-AB	FMSR250-AB
Travel(mm)	360	360	360
Rated Torque（N.M)	0.54	1.9	4.2
Peak Torque（N.M)	2.2	5.8	15.8
Load Capacity(Kg)[1]	30	30	30
Resolution(arcsec)	0.1	0.1	0.1
Min.Iincremental Motion(arcsec)[2]	0.5	0.5	0.5
Undirection Repeatability[3]/Guaranteed(arcsec)[4]	±1 or 2	±1 or 2	±1 or 2
Undirection Repeatability/Typical(arcsec)	±0.5 or 1	±0.5 or 1	±0.5 or 1
Bi-Directional Repeatability/Guaranteed(arcsec)	±1.5 or 3	±1.5 or 3	±1.5 or 3
Bi-Directional Repeatability/Typical(arcsec)	±1 or 2	±1 or 2	±1 or 2
Accuracy[3]/Guaranteed(arcsec)	±2.5 or 5	±2.5 or 5	±2.5 or 5
Accuracy/Typical(arcsec)	±2 or 4	±2 or 4	±2 or 4
Max.Speed(RPM)[5]	200	200	200
Face Runout(μm)	1	2	2
Radial Runout(μm)	0.05	0.05	0.05
Air Pressure(MPa)	0.4-0.6	0.4-0.6	0.4-0.6
Weight(Kg)	15	25	30

Remark：

[1]：The vertical-load of the center under the Horizontal-placement。

[2]：The minimum motion increment is not the same as resolution,It means the minimum amount that a motion system can move in a continuous, stable situation. Generally, The resolution of the system is much smaller than the minimum motion increment. In consideration of the influence of transmission structure and the system error of the encoder, To compared with the linear motor displacement stagess and the stepping motor displacement stagess, The minimum motion increment of the linear motor displacement stagess is more closer to the resolution.

[3]：The accuracy measurement data is the data measured by the laser interferometer when the platform is placed horizontally. The measurement standard reference to GB/T17421-2000

[4]：The difference between typical values and guaranteed values is described in the Technical Guide.

[5]：The maximum speed is typical values , On the basis of the difference of the load and the controller it would be Make a difference.

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Product size

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