真空步进电机⾼精度大台面通⽤平移台-Feinixs

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Product Details

FMS120V High Precision Vacuum Motor Stages

On the basis of FMS120 series, we designed FMS120V series Vacuum Stepper Motor Stages. The FMS120V is widely used in vacuum applications and can maintain high accuracy in -196 ~ + 250℃ high/ low temperature environments, various radiation environments and vacuum 10-7~ 10-3Pa environments.

The range of travel：100mm、200mm、300mm；

Solid frame design：Ensures XY-shaft assembly reliably with a maximum stroke of 300mm×300mm;

Vacuum environment use: series products can be used in vacuum;

Free standard edition SDK：Multiple development languages are supported in the Window or Linux environment；Such as C/C++、C#、Matlab、LabVIEW etc；

APPLICATION FIELDS

X-ray、 The Vacuum Chamber、 Extremely High/Low Temperature

TYPICAL ASSEMBLY

It can be ﬂexibly combined into multi-axis motion system,Contact for more information

ERROR CURVE

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Product parameters

Model	FMS120V-100	FMS120V-200	FMS120V-300
Travel(mm)	100	200	300
Load Capacity(Kg)[1]	20	20	20
Resolution(μm)	2.5	2.5	2.5
Min.Incremental Motion(μm)[2]	3	3	3
Undirection Repeatability[3]/Guaranteed(μm)[4]	±1 or 2	±2 or 4	±3 or 6
Undirection Repeatability/Typical(μm)	±0.5 or 1	±1 or 2	±2 or 4
Bi-Directional Repeatability/Guaranteed(μm)	±3 or 6	±3 or 6	±4 or 8
Bi-Directional Repeatability/Typical(μm)	±2 or 4	±2 or 4	±3 or 6
Accuracy[3]/Guaranteed(μm)	±12 or 24	±15 or 30	±20 or 40
Accuracy/Typical(μm)	±6 or 12	±8 or 16	±10 or 20
Max.Speed(mm/s)[5]	40	40	40
Straightness(μm)	12	15	20
Flatness(μm)	12	15	20
Yaw(arcsec)	30	40	50
Pitch(arcsec)	30	40	50
Weight(kg)	10.4	12	13.5

Remark：

[1]：The vertical-load of the center under the Horizontal-placement。

[2]：The minimum motion increment is not the same as resolution,It means the minimum amount that a motion system can move in a continuous, stable situation. Generally, The resolution of the system is much smaller than the minimum motion increment. In consideration of the influence of transmission structure and the system error of the encoder, To compared with the linear motor Motorized drive Stages and the stepping motor Motorized drive Stages, The minimum motion increment of the linear motor Motorized drive Stages is more closer to the resolution.

[3]：The accuracy measurement data is the data measured by the laser interferometer when the platform is placed horizontally. The measurement standard reference to GB/T17421-2000

[4]：The difference between typical values and guaranteed values is described in the Technical Guide.

[5]：The maximum speed is typical values , On the basis of the difference of the load and the controller it would be Make a difference.

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Product size

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