真空步进电机升降台-Feinixs

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Product Details

FMSZ Vacuum Stepper Motor Motorized Vertical Stages

The FMSZ series vacuum stepping motor Motorized Vertical Stages developed by Feinixs. Specially designed to facilitate the construction of multi-dimensional translation Stages with other Feinixs’ products.. Heavy load, other strokes can be customized. Equipping with FMC01 series controller.

The range of travel：20mm、50mm；

Special vacuum motor, high vacuum degree;

Stainless steel body design;

Free standard edition SDK：Multiple development languages are supported in the Window or Linux environment；Such as C/C++、C#、Matlab、LabVIEW etc；

The controller：Realize arc interpolation, linear interpolation, position memory to lead into arbitrary-graphics；

Option:Bus control of EtherCAT

APPLICATION FIELDS

Sample Stages、 Posture Adjustment、 Optical Test、 Optical Equipment

TYPICAL ASSEMBLY

It can be ﬂexibly combined into multi-axis motion system,Contact for more information

ERROR CURVE

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Product parameters

Model	FMSZ85VR-20	FMSZ115VR-50	FMSZ80V-50
Travel(mm)	20	50	50
Load Capacity(Kg)[1]	5	10	10
Resolution(μm)	0.625	0.625	0.625
Min.Incremental Motion(μm)[2]	2	2	1
Undirection Repeatability[3]/Guaranteed(μm)[4]	±1 or 2	±2 or 4	±1 or 2
Undirection Repeatability/Typical(μm)	±0.5 or 1	±1 or 2	±0.5 or 1
Bi-Directional Repeatability/Guaranteed(μm)	±2.5 or 5	±3 or 6	±2 or 4
Bi-Directional Repeatability/Typical(μm)	±1 or 2	±2 or 4	±1 or 2
Accuracy[3]/Guaranteed(μm)	±15 or 30	±20 or 40	±10 or 20
Accuracy/Typical(μm)	±10 or 20	±15 or 30	±5 or 10
Max.Speed(mm/s)[5]	10	10	20
Straightness(μm)	15	15	10
Flatness(μm)	15	15	10
Yaw(arcsec)	30	40	30
Pitch(arcsec)	30	40	30
Weight(kg)	3.2	6.8	5.2

Remark：

[1]：The vertical-load of the center under the Horizontal-placement。

[2]：The minimum motion increment is not the same as resolution,It means the minimum amount that a motion system can move in a continuous, stable situation. Generally, The resolution of the system is much smaller than the minimum motion increment. In consideration of the influence of transmission structure and the system error of the encoder, To compared with the linear motor displacement Stages and the stepping motor displacement Stages, The minimum motion increment of the linear motor displacement Stages is more closer to the resolution.

[3]：The accuracy measurement data is the data measured by the laser interferometer when the platform is placed horizontally. The measurement standard reference to GB/T17421-2000

[4]：The difference between typical values and guaranteed values is described in the Technical Guide.

[5]：The maximum speed is typical values , On the basis of the difference of the load and the controller it would be Make a difference.

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Product size

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